METHOD OF MANUFACTURING INKJET RECORDER

摘要

PROBLEM TO BE SOLVED: To form a piezoelectric element for an inkjet recorder capable of being fabricated into a multi-elemental one, which is a low-voltage type and has a good ink discharge capacity by forming a thin film of a lead dielectric such as a PZT and by finely fabricating them while retaining high piezoelectric characteristics by using a thin film forming process. SOLUTION: The method of manufacturing an inkjet recorder involves a preparation of a piezoelectric element 3 using a PZT thin film formed by an rf sputtering method and a formation of a thin film diaphragm 4 on the top wall of a pressure chamber 1. COPYRIGHT: (C)2004,JPO&NCIPI