LIQUID JET HEAD, ITS MANUFACTURING METHOD AND LIQUID JET DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a liquid jet head capable of keeping liquid discharge characteristics constant over a long period of time and preventing the clogging of a nozzle, its manufacturing method and a liquid jet device. SOLUTION: In the liquid jet head equipped with a flow channel forming substrate 10 comprising a silicon single crystal substrate and having pressure producing chambers 12 communicating with nozzle orifices formed thereto and a pressure producing element 300 for causing a pressure change in the pressure producing chambers 12, a liquid-resistant protective film 100 comprising tantalum oxide is provided to at least the surface of the inner wall of each of the pressure producing chambers 12. COPYRIGHT: (C)2004,JPO&NCIPI