| 摘要 |
PROBLEM TO BE SOLVED: To further downsize the excimer lamp lighting device in which a pair of electrodes are installed on the outer face of a discharge container in the excimer lamp discharging through a dielectric material. SOLUTION: This is the excimer lamp light-emitting device which is constructed of a discharge container in which discharge gas is filled and which is made of the dielectric material, an excimer lamp which is made of a pair of outer electrodes arranged on the outer face of this discharge container, and a power supply device for supplying continuously a periodic pulse voltage of a same polarity to the electrode of this excimer lamp. The power supply device comprises a switching means for generating the periodic pulse voltage and a polarity determining means, and this polarity determining means selects a different polarity from the pulse voltage at the time of previous lighting when the excimer lamp is lighted from the switch-off state. COPYRIGHT: (C)2004,JPO&NCIPI |
