| 摘要 |
PROBLEM TO BE SOLVED: To provide a mark position detector for detecting the position of a mark with high accuracy and reducing measurement error, TIS, independently of color (wavelength). SOLUTION: This mark position detector comprises an illumination optical system 10 for irradiating illumination light to a measurement mark 63 and an imaging optical system 20 for forming an image of the measurement mark 63 at an imaging device 30 by converging reflected light from the measurement mark 63, and measures displacement of the measurement mark by processing an image signal obtained by the imaging device 30. The optical system 10 is provided with an optical element 13 for compensating a difference in asymmetry of the image signal depending on the wavelength of the illumination light. COPYRIGHT: (C)2004,JPO&NCIPI
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