发明名称 HEATER FOR VACUUM TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress occurrence of unexpected repeated flexural stress, by raising an electric power (watt density) per unit area supplied to a sheathed wire heater, and predicting easily thermal expansion and contraction of the sheathed wire heater in design. SOLUTION: Blackening treatment (12) is carried out to the surface of the sheathed wire heater (10) by using a solid lubricant. A closed place (24) to house the sheathed wire heater (10) displaceably corresponding to thermal expansion is formed at a heater panel (20). The sheathed wire heater (10) is adhered and arranged in the closed place (24) of the heater panel (20). COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004265808(A) 申请公布日期 2004.09.24
申请号 JP20030056672 申请日期 2003.03.04
申请人 ISHIKAWAJIMA HARIMA HEAVY IND CO LTD 发明人 WATABE YOSHI
分类号 H05B3/48;C23C16/46;H05B3/06;(IPC1-7):H05B3/48 主分类号 H05B3/48
代理机构 代理人
主权项
地址
您可能感兴趣的专利