| 摘要 |
PROBLEM TO BE SOLVED: To exchange an ion accelerating electrode without damaging vacuum state of a vacuum chamber. SOLUTION: A sub-chamber 102 is mounted on a vacuum chamber 101 of a time of flight type mass spectrometer 100. An ion accelerating electrode 122 is mounted on a moving table 120 housed in a cartridge 121. The moving table 120 can move the vacuum chamber 101 and the sub-chamber 102 along a moving rail 104. In electrode exchanging, a partition door 103 is opened and the moving table 120 is moved to the sub-chamber 102, the partition door 103 is closed, an electrode exchange door 112 is opened, and the ion accelerating electrode 122 is exchanged including the cartridge. After that, the electrode exchange door 112 is closed, and the moving table 120 is returned to the vacuum chamber 101 again. COPYRIGHT: (C)2004,JPO&NCIPI
|
