| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide plasma process equipment which can introduce microwave energy efficiently to a treatment room by improving transmission efficiency of the microwave passing an aperture of a slot antenna. <P>SOLUTION: The plasma process equipment is provided with a treatment room, an introduction wave guide 4 having an internal space 20 where a first standing wave of the microwave is formed by resonance, dielectics 5p, 5q in which a second standing wave of the microwave is formed by resonance, and a slot antenna 6 having a slot for introducing the microwave from an internal space 20 to the dielectrics 5p and 5q. The slot 6a is installed so as to substantially make the spot where the loop of the first standing wave is projected vertically to the slot antenna 6, coincident with a spot where the loop of the second standing wave is projected vertically to the slot antenna 6. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
