APPARATUS AND METHOD FOR DRAINING/CLEANING SLURRY

摘要

PROBLEM TO BE SOLVED: To provide a method for draining/cleaning slurry in high efficiency. SOLUTION: This method for draining/cleaning slurry by using a group of two or more slurry treatment parts each of which is fixed independently of one another at a fixed position and is provided with a filter and in each of which slurry can be housed comprises a step (a) to supply slurry to each of the slurry treatment parts, a draining step (b) to suck/filter the supplied slurry, a cleaning step (c) to clean the residue obtained at the step (b) by supplying a cleaning liquid to the residue and suck/filter the residue-mixed cleaning liquid through the filter. These steps are successively carried out synchronously in each of the slurry treatment parts. COPYRIGHT: (C)2004,JPO&NCIPI