| 摘要 |
PROBLEM TO BE SOLVED: To inhibit the remaining of a cleaning liquid and the occurrence of an electrolytic corrosion on a cleaned object such as an electro-optics panel, substrate and the like. SOLUTION: A cleaning apparatus 100 comprises a water-jet nozzle 10 and a blowing nozzle 20. Before mounting, a terminal 52 or the like of an electro-optics panel 50 is cleaned for the purpose of removing foreign objects, inorganic dirt such as glass powder and the like. The water-jet nozzle 10 and the blowing nozzle 20 are attached to a base 30. While the electro-optics panel 50 is transported by a conveyance belt 40 as mounted thereon, a super-pure water is jetted out of the water-jet nozzle 10 to wash the terminal 52, followed by drying the same using the blowing nozzle 20 disposed near the down stream side of the water-jet nozzle 10. COPYRIGHT: (C)2004,JPO&NCIPI
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