| 摘要 |
PURPOSE: An apparatus for fabricating process liquid is provided to precisely control the flowrates of various kinds of liquids and mix the liquids of a desired quantity by respectively decompressing the various kinds of liquids at each predetermined pressure while making the decompressed liquid loaded. CONSTITUTION: A plurality of supply parts(4,5,6) supply various kinds of liquids. One end of a plurality of supply pipes(1,2,3) is connected to each supply part. A plurality of decompressing valves(11,24,34) decompress the liquid supplied from each supply part to each supply pipe at a predetermined pressure, installed in each intermediate part of each supply pipe. An orifice(12,25,35) loads each liquid decompressed by each decompressing valve at a predetermined pressure, installed in the downstream side of each decompressing valve. The other end of each supply pipe is connected to a mixing tank(14) in which each liquid controlled to be a predetermined flowrate by the decompressing valve and the orifice is introduced and mixed.
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