发明名称 ACCELERATION SENSOR AND TILT DETECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide an acceleration sensor for precisely detecting a tilt angle of equipment. <P>SOLUTION: The acceleration sensor for detecting tilt displacement from the basic posture of a specific article has a sensor chip having a detection surface including a detection axis of either one axis for detecting the tilt displacement or two crossing axes. An axis for orthogonally crossing the detection surface of the sensor chip is arranged so that it can be in parallel with the reference surface of the article in the basic posture. Then, the sensor chip obtains an output signal according to the tilt displacement of the reference surface. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004264053(A) 申请公布日期 2004.09.24
申请号 JP20030033016 申请日期 2003.02.10
申请人 TOKYO ELECTRON LTD 发明人 HARADA MUNEO;IKEUCHI NAOKI;HASHIMOTO HIROYUKI
分类号 G01C9/06;G01C9/08;G01P15/12;G01P15/18 主分类号 G01C9/06
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