发明名称 |
ACCELERATION SENSOR AND TILT DETECTION METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor for precisely detecting a tilt angle of equipment. <P>SOLUTION: The acceleration sensor for detecting tilt displacement from the basic posture of a specific article has a sensor chip having a detection surface including a detection axis of either one axis for detecting the tilt displacement or two crossing axes. An axis for orthogonally crossing the detection surface of the sensor chip is arranged so that it can be in parallel with the reference surface of the article in the basic posture. Then, the sensor chip obtains an output signal according to the tilt displacement of the reference surface. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
申请公布号 |
JP2004264053(A) |
申请公布日期 |
2004.09.24 |
申请号 |
JP20030033016 |
申请日期 |
2003.02.10 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
HARADA MUNEO;IKEUCHI NAOKI;HASHIMOTO HIROYUKI |
分类号 |
G01C9/06;G01C9/08;G01P15/12;G01P15/18 |
主分类号 |
G01C9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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