ULTRAPURE WATER MANUFACTURING SYSTEM AND ITS OPERATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an ultrapure water manufacturing system which is capable of rapidly supplying ultrapure water of stable water quality even after exchanging cartridge polishers in secondary pure water manufacturing systems. SOLUTION: The ultrapure water manufacturing system has the plurality of secondary pure water manufacturing systems equipped with the exchangeable cartridge polishers (hereafter the "polishers") and is constituted by connecting the outlet line of the polishers of the high water quality secondary pure water manufacturing system (hereafter the "former system") for which high water quality is required and the outlet line of the polishers of the low water quality secondary pure water manufacturing system (hereafter the "latter system") for which relatively low water quality is required in such a manner that the supply destinations of the treated water of the respective polishers can be changed over with each other. In the method for operating the ultrapure water manufacturing system, the polishers of the former system are exchanged, then the water treated with the polishers of the former system is supplied to the outlet line of the polishers of the latter system until the period for stabilization of the treatment performance previously determined by testing elapses, and the water treated with the polishers of the latter system is supplied to the outlet line of the polishers of the former system and the normal supply is resumed after the lapse of the period for stabilization of the treatment performance. COPYRIGHT: (C)2004,JPO&NCIPI