| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly control a chemical treatment liquid on the basis of the measured result of a plurality of components in the chemical treatment liquid by a single analyzing means. <P>SOLUTION: The method for controlling the chemical treatment liquid comprises diluting the chemical treatment liquid containing the plurality of components into a predetermined concentration, injecting the fixed amount of it into a capillary tube for electrophoresis, electrophoresing the components by applied voltage to the capillary tube, measuring the amount of change in a transmitted light at every migration time corresponding to each component, comparing measured values corresponding to each component with the standard values, and adding a chemical solution containing a high concentration of the component of which the measured value is less than the standard value by a predetermined amount, into a chemical treatment liquid tank from a storage tank. The device used therefor is also proposed. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
