摘要 |
<P>PROBLEM TO BE SOLVED: To develop a catalyst for selectively manufacturing a carbon nanocoil in a uniform shape, and provide a mass-production method of the catalyst. <P>SOLUTION: This catalyst is an indium-tin-iron catalyst for manufacturing the carbon nanocoil 1 of at most 1,000 nm diameter by chemical vapor-phase growth. The indium-tin-iron catalyst is composed of catalytic fine particles 24, whose diameters are prepared in the range of 1 nm-100 μm. A catalyst thin film 20 is formed on a substrate 18, and then the substrate 18 is annealed to form the catalyst thin film 20 into fine particles. Alternatively, the catalyst thin film is formed on the substrate 18, while the substrate 18 is being heated, and the thin film is simultaneously formed into fine particles. As a solution method, an indium compound, a tin compound, and an iron compound are dispersed in a solvent to form colloidal particles, and solid matters are separated and burned to form catalytic fine particles. <P>COPYRIGHT: (C)2004,JPO&NCIPI |