摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device which has small frequency variation due to temperature variation during use, in a surface acoustic wave device equipped with a piezoelectric substrate 1 having at least one IDT (inter digital transducer) electrode on one main surface and a package base 3. SOLUTION: The piezoelectric substrate 1 has an organic substance film 3 having a larger coefficient of thermal expansion than the piezoelectric substrate 1 on the other main surface, which is curved inwardly. Further, the piezoelectric substrate 1 is fixed to the package base 4 with a fixing agent 5 at the center part of the other main surface in a surface acoustic wave propagation direction. This surface acoustic wave device is equipped with a compensating means which is adaptive to variation accompanying a temperature rise and then a stable high-precision surface acoustic wave device can be provided which has small frequency variation due to temperature variation during use. COPYRIGHT: (C)2004,JPO&NCIPI
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