| 摘要 |
PROBLEM TO BE SOLVED: To obtain a microelectronic mechanical system (MEMS) element in which a mirror is comparatively easily returned to an original position when an actuator which drives the mirror makes a contact with a substrate by an electrostatic attractive force and to obtain such an optical device as an optical attenuator using the MEMS element. SOLUTION: A mirror part 202 and actuators 205 and 206 are connected to fixed parts 209 and 210 with torsion springs 207 and 208, respectively, and receives a turning force around a turning axis 203 by an electrostatic attractive force of the actuators 205 and 206 and a silicon substrate 215 driven by a power source 217. Small projected parts 251 to 254 are provided on the side part of the actuators 205 and 206, and the side parts are weakly fitted with the upper surface of the silicon substrate 215 because of point contacts of the projected parts and the upper face of the silicon substrate. The actuators 205 and 206 are comparatively easily returned to the original turning position by stopping the application or the like of the driving voltage. COPYRIGHT: (C)2004,JPO&NCIPI |
