| 摘要 |
PROBLEM TO BE SOLVED: To inspect defects such as a casting nest, an injury, a contaminant or the like at high speed. SOLUTION: This defect inspection device is provided with a support member 12 having an illumination optical system 3 for illuminating the inner surface of a cylindrical object 1 to be inspected and a detection optical system 10, which comprises a reflecting optical element 2 for reflecting the reflected light image of the optical system in an axial direction so as to obliquely detect the same, an image forming optical element 4 for forming the reflected light image linearly and a linear image sensor 5 for receiving the linear reflected light image to output an image signal, attached thereto and constituted so as to detect a two-dimensional image signal from the linear sensor by rotating the support member centering around the axis of the inner surface of the cylindrical object. By controlling the distance L of the detection optical system, a detected angleθr is made constant even if a condition such as the size of the object or the like changes. COPYRIGHT: (C)2004,JPO&NCIPI
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