| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a radiation imaging device which solves the problem on static electricity in a moisture-proof layer forming process, and can simplify the moisture-proof layer forming process. SOLUTION: There are provided at least an optical sensor disposed inside a substrate, an electrode lead-out part disposed in its outer peripheral part, an optical sensor protection layer covering the optical sensor, and a phosphor later formed above the optical sensor protection layer by exposing an outer peripheral part of the optical sensor protection layer. In the process of covering the electrode lead-out part by using a substrate holder to form a phosphor protection layer on the overall periphery of the substrate/optical sensor/optical sensor protection layer/phosphor layer, the substrate holder which is subjected to a mold release process on its surface is used, and a bonding force of the phosphor protection layer adhered to the surface of the substrate holder is smaller than the bonding force of the phosphor protection layer adhered to the optical sensor protection layer. COPYRIGHT: (C)2004,JPO&NCIPI
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