| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus for a composite structure object wherein the manufacture of the composite structure object by an aerosol deposition method is ensured without requiring a large-sized chamber and a large-sized exhaust system like before, and the throughput of productivity is improved largely, and film formation is ensured without choosing a substrate size. SOLUTION: In the manufacturing apparatus for a composite structure object, aerosol in which particulate are distributed in gas is made to collide with a substrate, and a structure object composed of structure of the particulate is formed on a surface of base material. The manufacturing apparatus is constituted of a pad which abuts against the surface of the base material and forms closed volume, a nozzle which is fixed with the pad and derives the aerosol generated by aerosol generating equipment to the substrate, and a particulate withdrawal mechanism which is connected to an aperture formed on the pad and sucks particulate which rebounded from the substrate or dissipated. COPYRIGHT: (C)2004,JPO&NCIPI
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