| 摘要 |
PROBLEM TO BE SOLVED: To provide a shaft alignment system and its method which can discriminate slight contact or the like between a shaft insertion section and a shaft which performs reciprocating motion along the length direction, can be automatized, and can perform high-precision shaft alignment. SOLUTION: A shaft support member 3, for supporting the shaft 2 via a spring 4, is fixed and held with a cylinder 61 being an origin-setting means, X stage 62 which is a shaft support member moving means, and a Y stage (not shown). After the shaft 2 is shifted from a parallel position, it is released and caused to perform motion. The motion is detected by a position detection sensor 7, its output is analyzed with a vibration analyzer 8, whether the shaft 2 touches the shaft insertion section 11 is determined, and the shaft 2 is positioned. Whether there is contact can also be determined, by using acoustic emission or the like. COPYRIGHT: (C)2004,JPO&NCIPI
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