| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for making a transmission electron microscope observation specimen for satisfactory TEM observation by removing roughness on an amorphous layer or on an observed cross-section, these being formed by focused ion beam irradiation in manufacturing. SOLUTION: The observation specimen is made out of an observation specimen substrate, the specimen having a structure made by together combining a columnar specimen body 3, a pyramid-shaped support body 4 projecting in a columnar shape vertically from the specimen body 3, and a thinned part 5, worked/formed to have a width including an observed area, thin-formed, and equipped with an observation face, on an end of the pyramid-shaped support body. The observation face is sputter-etched by irradiating the observation face with an ion beam at a low angle. This makes it possible to remove roughness on the amorphous layer or on the observed cross-section formed by the focused ion beam irradiation, to make the transmission electron microscope specimen with high quality, and to perform satisfactory TEM observation. COPYRIGHT: (C)2004,JPO&NCIPI
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