APPARATUS FOR COMING INTO CONTACT WITH HIGH TEMPERATURE GAS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus suitable for bringing a high temperature gas, for example, hydrogen into contact with tetrachlorosilane. SOLUTION: A reactor 100 is used for the hydrogenation of tetrachlorosilane. The reactor 100 has at least a component prepared from a silicon carbide based structural material. The reactor 100 includes a shell 101 capable of pressurization, a heat insulating material 102 surrounded by the shell 101 capable of pressurization, a heating element 106 surrounded by the insulating material 102 and a reaction chamber 107 surrounded by the heating element 106. COPYRIGHT: (C)2004,JPO&NCIPI