SUPERPRECISION CLEANING APPARATUS USING SUPERCRITICAL FLUID HAVING IMPROVED STRUCTURE TO PERFORM UNIFORMLY AND EFFICIENTLY CLEANING PROCESS

摘要

PURPOSE: A superprecision cleaning apparatus using supercritical fluid having an improved structure is provided to perform uniformly and efficiently a cleaning process by improving a spraying structure and a structure of a sustain plate. CONSTITUTION: A cleaning fluid supply unit(10) stores and supplies one or more kinds of cleaning fluid. A heat exchanger(20) is used for mixing or cooling the one or more kinds of cleaning fluid. A high-pressure pump(30) is used for pressing the cleaning fluid to form the supercritical fluid. A reaction unit(40) cleans a target by using the supercritical fluid of the high-pressure pump. A processing unit processes the cleaning fluid of the reaction unit. The reaction unit includes a sustain plate for loading the target, a driver for rotating the sustain plate, and a sprayer for spraying the supercritical fluid.