| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer for calibrating a foreign matter measuring instrument and its manufacturing method for contributing to the enhancement of sensitivity calibration accuracy without causing an increase in a manufacturing cost. SOLUTION: Pseudo foreign matter P is formed out of projection parts 2 made of a high melting point metal formed on an upper face of the wafer 1 and a coating film 3 formed on the whole of the upper face of the wafer 1 including the projection part 2. COPYRIGHT: (C)2004,JPO&NCIPI
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