| 摘要 |
PROBLEM TO BE SOLVED: To provide a light wave interferometer for simply and effectively reducing the effect of noises irrelevant to information on a measurement region of a specimen. SOLUTION: This light wave interferometer 10 is equipped with a light source 12, a beam splitter 14, a reference mirror 16, and an imaging means 18, and acquires information on the measurement region of the specimen 30 based on an interference fringe image obtained by the imaging means 18. This interferometer is characterized by being equipped with a displacement means 42 provided on the imaging means 18 for displacing the imaging means 18 in its optical axis direction, and a control means 20 for causing the displacement means 42 to displace the imaging means 18 so as to continuously change the length of an optical path between the beam splitter 14 and the imaging means 18 while interference fringes are imaged by the imaging means 18. COPYRIGHT: (C)2004,JPO&NCIPI
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