发明名称 |
N-type droping of nanocrystalline diamond films with nitrogen and electrodes made therefrom |
摘要 |
An electrically conducting n-type ultrananocrystalline diamond (UNCD) having no less than 10<19 >atoms/cm<3 >of nitrogen is disclosed. A method of making the n-doped UNCD. A method for predictably controlling the conductivity is also disclosed.
|
申请公布号 |
US6793849(B1) |
申请公布日期 |
2004.09.21 |
申请号 |
US20030398427 |
申请日期 |
2003.12.12 |
申请人 |
THE UNIVERSITY OF CHICAGO |
发明人 |
GRUEN DIETER M.;KRAUSS ALAN R.;AUCIELLO ORLANDO H.;CARLISLE JOHN A. |
分类号 |
C23C16/27;C30B25/10;H01B1/04;(IPC1-7):H01B1/04;B01J3/06;C01B31/06;C30B29/04 |
主分类号 |
C23C16/27 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|