发明名称 |
Micromirror unit with torsion connector having nonconstant width |
摘要 |
A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
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申请公布号 |
US6795225(B2) |
申请公布日期 |
2004.09.21 |
申请号 |
US20010984814 |
申请日期 |
2001.10.31 |
申请人 |
FUJITSU LIMITED;FUJITSU MEDIA DEVICES LIMITED |
发明人 |
TSUBOI OSAMU;UEDA SATOSHI;MIZUNO YOSHIHIRO;SAWAKI IPPEI;OKUDA HISAO |
分类号 |
G11B7/135;B81B3/00;B81C1/00;G02B26/08;G11B7/09;(IPC1-7):G00B26/08 |
主分类号 |
G11B7/135 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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