发明名称 |
Umbilical cord facilities connection for an ion beam implanter |
摘要 |
An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum implantation chamber wherein a workpiece is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. The ion beam implanter further includes a workpiece support structure coupled to the implantation chamber and supporting the workpiece. The workpiece support structure includes a chuck including a rotatable pedestal for supporting the workpiece. The workpiece support structure further includes a first rotatable reel coupled to and rotatable with the pedestal and a flexible, hollow cord carrying facilities such as coolant lines and electrical power conductors coupled to the rotatable reel such that, as the pedestal is rotated in a first direction, a length of the flexible cord that is wrapped around the first reel increases and, as the pedestal is rotated in an opposite direction, a length of the flexible cord that is wrapped around the first reel decreases.
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申请公布号 |
US6794664(B1) |
申请公布日期 |
2004.09.21 |
申请号 |
US20030728669 |
申请日期 |
2003.12.04 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
MITCHELL ROBERT J.;RYAN KEVIN T. |
分类号 |
G21K5/04;H01J37/317;H01L21/00;H01L21/683;H01L21/687;(IPC1-7):H01J37/08;G21G5/00 |
主分类号 |
G21K5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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