发明名称 Method for producing a one- or multidimensional detector array
摘要 In order to produce a one- or multidimensional detector array (9; 15, 17; 70) for detecting electromagnetic radiation, in particular for detecting X-rays, a layer composite (1) is produced. The latter has a sensor layer (3) with a material (M) sensitive to the radiation, and a carrier layer (5). In order to subdivide the sensor layer (3) into individual elements (E11, E12, . . . E1m, E21, . . . Enm) that are isolated from one another, separating spaces (7) are introduced into the sensor layer (3) by material (M) being removed. Preferably, a reflector material (R) is introduced or filled into the separating spaces (7). In order to produce a plurality of one-dimensional detector arrays (70), a structure of elements (E11, E12, . . . E1m, E21, . . . Enm) arranged in a matrix-like manner, which structure is produced by the separating spaces (7) is broken down into row portions (52, 53, . . . 63) or into column portions.
申请公布号 US6793857(B2) 申请公布日期 2004.09.21
申请号 US20010985563 申请日期 2001.11.05
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 OTTO WALTER
分类号 G01T1/20;G01T1/202;H01L27/14;H01L31/09;(IPC1-7):B32B31/18 主分类号 G01T1/20
代理机构 代理人
主权项
地址