RECEPTACLE FOR STORING MATERIALS USED FOR SEMICONDUCTOR FABRICATION PROCESS

摘要

PURPOSE: A material storage receptacle is provided to remove fully residual materials from a bottom part by separating the bottom part from a main body and rotating the bottom part. CONSTITUTION: A separation unit(45) is connected to a main body or a bottom part of a material storage receptacle in order to separate the bottom part from the main body. A rotation unit(35) is connected to the bottom part of the material storage receptacle in order to rotate the bottom part of the material storage receptacle separated by the separation unit. The bottom part is formed with a convex part having an inclined part from an inside to an outside.