| 摘要 |
Polishing slurry has abrading particles dispersed in a liquid dispersant. The abrading particles are composite particles each having a first particle and a plurality of second particles smaller than the first particles attached to the surface of the first particle through a metal oxide membrane. The first particles have average diameter of 0.1-20 mum and the second particles have average diameter of 0.001-0.5 mum. Elastic particles may be used as the first particles such as polymer particles.
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