OVERLAP MARK OF SEMICONDUCTOR DEVICE TO PREVENT MEASUREMENT ERROR AND TO IMPROVE SPACE MARGIN

摘要

PURPOSE: An overlap mark of a semiconductor device is provided to prevent measurement error and to improve space margin by embedding simultaneously measure marks having different shape at a single position. CONSTITUTION: An overlap mark is provided with a single inner box(15) and two outer bars having different shape. The inner box is formed at a center portion. The first outer bars(11) are surrounded to the inner box. The second outer bars(13) are formed between the inner box and the first outer bars. The distance between the first and second bar is 10 micro meter.