MOVABLE GANTRY POSITION MEASUREMENT APPARATUS INCLUDING FIRST MEASUREMENT MODULE FOR MEASURING FIRST SET OF DISPLACEMENTS AND SECOND MEASUREMENT MODULE FOR MEASURING SECOND SET OF DISPLACEMENTS, MOVABLE GANTRY POSITION MEASUREMENT METHOD, MULTIPLE AXIS SETTING APPARATUS, POSITION DETERMINATION METHOD, AND POSITION SETTING METHOD

摘要

PURPOSE: A movable gantry position measurement apparatus, a movable gantry position measurement method, a multiple axis setting apparatus, a position determination method, and a position setting method are provided to achieve improved accuracy of measurement by measuring at least two sets of displacements. CONSTITUTION: A movable gantry position measurement apparatus comprises a first measurement module and a second measurement module. The first measurement modules measures a first set of displacements at a work point with respect to an intermediate element(3). The measured first set of displacements includes a relatively larger displacement(X) and relatively smaller displacements(Y1',Y2') at least at two of five degrees of freedom except a first degree of freedom. The second measurement module measures a second set of displacements of the intermediate element with respect to a work space(9). The measured second set of displacements includes a relatively larger displacement(Y1) at a second linear degree of freedom different from the first degree of freedom, and relatively smaller displacements(X1',X2') at least at two of five degrees of freedom except the second degree of freedom.