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发明名称
矽晶圆制造机台之控制方法
摘要
本发明系有关一种应用于一矽晶圆制造机台中之控制方法,此矽晶圆制造机台系为一具有多反应室、并可用以进行不同制程(包括生产及测试制程)之机台。俾当矽晶圆制造机台撷取到矽晶圆半成品所定义之模式代码后,可根据模式代码以得知矽晶圆半成品欲进行生产或测试制程,并找出与模式代码定义有相同制程之制程代码,用以将矽晶圆半成品传送至定义有此制程代码之反应室中,藉以进行对应之制程。根据本发明之方法,可控制矽晶圆制造机台在同时间对不同批次之矽晶圆半成品进行生产或测试之制程。
申请公布号
TW200418122
申请公布日期
2004.09.16
申请号
TW092105602
申请日期
2003.03.14
申请人
应用材料股份有限公司
发明人
易锦良;彭智煌;简文隆;崔浩铭;黄祖磊
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
吴冠赐;杨庆隆;苏建太
主权项
地址
美国
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