| 摘要 |
PROBLEM TO BE SOLVED: To provide a lift pin capable of stably supporting a wafer by neutralizing an accumulated electric charge without causing a bad influence on the wafer. SOLUTION: The lift pin 3 composed of a semi conductive ceramics for supporting a wafer used in a semiconductor manufacturing device or the like comprises a tip end 5 which contacts with the wafer, a connecting part 6 composed of metal with its diameter larger than that of the rear end face of the tip end 5, and a screw shaped rear end 7 composed of a metal. The tip end 5 of the lift pin 3 is press inserted in the connecting part 6 and the semiconductor ceramics is a silicon carbide. COPYRIGHT: (C)2004,JPO&NCIPI |
