| 摘要 |
PROBLEM TO BE SOLVED: To provide a servo mechanism adapted to move a driver along a target route by controlling driving systems having two orthogonal directions, reducing a moving route error of the driver to the target route although it has been difficult heretofore to make the driver move along the target route due to a difference in characteristic between the respective driving systems. SOLUTION: In a Y driving system 3 driving the driver in the direction of y, a first command signal y<SB>ref</SB>giving a command to move the driver in the direction of y is multiplied by a first correction coefficient K<SB>pY</SB>using a first correction coefficient multiplication means 311 to compensate for the characteristic of the first command signal y<SB>ref</SB>. Also in an X driving system 4 driving the driver in the direction of x, similarly a second command signal x<SB>ref</SB>is multiplied by a second correction coefficient K<SB>pX</SB>using a second correction coefficient multiplication means 411 to compensate for the characteristic of the second command signal x<SB>ref</SB>. COPYRIGHT: (C)2004,JPO&NCIPI
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