| 摘要 |
PROBLEM TO BE SOLVED: To certainly prevent an alignment defect resulting from impurities in a flattening film and in an overcoat film. SOLUTION: A resin film is applied on a substrate and hardened. Subsequently it is left for a certain period under high temperature so as to sufficiently enhance the hardening reaction. Subsequently the impurities such as unreacted components and a solvent existing in the resin film are washed and removed using boiling water, a polar solvent, developer and so on as a washing liquid and after the impurities in the resin film is thus sufficiently removed, an alignment layer is formed. COPYRIGHT: (C)2004,JPO&NCIPI
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