THIN FILM STRIPPING TEST METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a thin film stripping test method and an apparatus for beating a test piece on a side opposite to a thin film by using a mass element such as a hammer etc. and implementing a test for reproducing an actual peel state of the thin film. SOLUTION: The thin film stripping test method and the apparatus use a method for testing and beating the test piece (3) having the thin film (3b) formed on one surface and fixed to a support table (15) on the side (3D) opposite to the thin film by using the mass element (14) such as the hammer etc. COPYRIGHT: (C)2004,JPO&NCIPI