发明名称 |
WIRE SAW ABRASIVE GRAIN SUITABLE FOR RECYCLING, SLURRY RECYCLING METHOD, AND WIRE SAW SYSTEM |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide granular abrasive grains which keep cutting accuracy after being recycled and used for a long period, and and also to provide a method of recycling slurry. <P>SOLUTION: The slurry is recycled by recovering effective abrasive grains from used slurry, removing worn-out abrasive grains, and adding new abrasive grains 74 in a quantity corresponding to that of the removed grains. Average circularity of the new grains 74 is in a range of 0.855-0.875. The weight ratio of the new grains 74 to be added to the recovered effective grains is approximately 20%. Further, average circularity of the grains in the recycled slurry recycled by the method is within a range of 0.870-0.885. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
申请公布号 |
JP2004255534(A) |
申请公布日期 |
2004.09.16 |
申请号 |
JP20030050321 |
申请日期 |
2003.02.27 |
申请人 |
KOMATSU ELECTRONIC METALS CO LTD |
发明人 |
IWAKIRI GIICHIRO;KANAMARU YOSHIHIKO;ETO YOSHIHIRO |
分类号 |
B24B57/02;B24B27/06;B28D5/04;H01L21/304;(IPC1-7):B24B27/06 |
主分类号 |
B24B57/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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