发明名称 WIRE SAW ABRASIVE GRAIN SUITABLE FOR RECYCLING, SLURRY RECYCLING METHOD, AND WIRE SAW SYSTEM
摘要 <p><P>PROBLEM TO BE SOLVED: To provide granular abrasive grains which keep cutting accuracy after being recycled and used for a long period, and and also to provide a method of recycling slurry. <P>SOLUTION: The slurry is recycled by recovering effective abrasive grains from used slurry, removing worn-out abrasive grains, and adding new abrasive grains 74 in a quantity corresponding to that of the removed grains. Average circularity of the new grains 74 is in a range of 0.855-0.875. The weight ratio of the new grains 74 to be added to the recovered effective grains is approximately 20%. Further, average circularity of the grains in the recycled slurry recycled by the method is within a range of 0.870-0.885. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p>
申请公布号 JP2004255534(A) 申请公布日期 2004.09.16
申请号 JP20030050321 申请日期 2003.02.27
申请人 KOMATSU ELECTRONIC METALS CO LTD 发明人 IWAKIRI GIICHIRO;KANAMARU YOSHIHIKO;ETO YOSHIHIRO
分类号 B24B57/02;B24B27/06;B28D5/04;H01L21/304;(IPC1-7):B24B27/06 主分类号 B24B57/02
代理机构 代理人
主权项
地址