| 摘要 |
PROBLEM TO BE SOLVED: To provide an analysis method and an analysis apparatus that can measure the shape of a small object containing an organic compound, such as a polymer, adhering onto the sample surface of a semiconductor substrate, or the like, and can analyze the chemical structure of the small object. SOLUTION: The method and apparatus for analyzing the shape/structure of the small object use an optical fiber 14 as a probe of a sheer force microscope 10 as a scan type probe microscope (SPM) and scan the small object 28 by the probe. As a result, the shape of the small object 28 is measured, light is emitted from the probe comprising the optical fiber 14 to the small object 28 to generate ions 29, and the ions 29 are incorporated into a TOF-MS apparatus 11, namely a mass spectrometry mechanism, for performing the mass spectrometry of the ions 29. COPYRIGHT: (C)2004,JPO&NCIPI
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