| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-efficiency microwave discharge light source device, using a cooling method which reduces a disturbance of electromagnetic field of a microwave, where in particular, the microwave discharge light source uses a high-pressure excimer lamp which radiates a high-power excimer light. SOLUTION: The microwave discharge light source device comprises a discharge vessel filled with an excimer discharge gas at a charged pressure of 10 kPa or higher at room temperature, and a microwave power source, where the discharge vessel is housed in a waveguide and has a straight tube-like conductive member in contact with the discharge vessel itself, the straight tube-like conductive member is placed in a direction perpendicular to the traveling direction of the microwave and perpendicular to the direction of the electric field, and a cooling medium flows through the conductive member. COPYRIGHT: (C)2004,JPO&NCIPI
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