| 摘要 |
PROBLEM TO BE SOLVED: To evade the performance deterioration or failure of a vacuum pump by preventing air bubbles of a washing liquid from reaching an evacuation line. SOLUTION: In the subject vacuum washing method for washing a material 20 to be washed which is dipped in the washing liquid 12 in a washing vessel 10 by repeating a vacuum operation for evacuating the washing vessel 10 to a set vacuum degree and, after the vacuum operation, an opening operation for introducing the air into the washing vessel 10, when foam is detected during the vacuum operation by a foam detector 38 provided in the washing vessel 10, the evacuation line is immediately stopped by a controller 46 to open an air suction valve 36 and to introduce the air in the washing vessel 10. After that, the method is returned to the vacuum operation. COPYRIGHT: (C)2004,JPO&NCIPI
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