DIFFRACTION GRATING HAVING HIGH THROUGHPUT EFFIENCY
摘要
<p>A reflective diffraction grating having grooves and ridges and providing high throughput efficiency in the minus-first diffraction order. All but the zeroth diffraction order and the minus-first diffraction order may be prevented from existence by directing the radiation onto the grating at an appropriate angle. The radiation having a TM polarization is eliminated from the zeroth order by destructive interference by appropriate selection of a the groove width of the grating, and radiation having a TE polarization is eliminated from the zeroth order by destructive interference by depositing an overcoat of an appropriate thickness. A dielectric material may be deposited in the grooves.</p>
申请公布号
WO2004079410(A1)
申请公布日期
2004.09.16
申请号
WO2004US00151
申请日期
2004.01.06
申请人
POLYCHROMIX CORPORATION;SMITH, MALCOLM, C.;PAYNE, RICHARD, S.