HAFNIUM ALLOY TARGET AND PROCESS FOR PRODUCING THE SAME

摘要

A hafnium alloy target characterized in that either or both of Zr and Ti are contained in a total amount of 100 wt.ppm to 10 wt.% in I and Hf. The average crystal grain diameter thereof is in the range of 1 to 100 mum, and the content of each of impurities Fe, Cr and Ni therein is 1 wt.ppm or less. Further, with respect to the hafnium alloy target, the crystal habit face orientation factor of four planes consisting of {002} plane and, lying within 35° from this plane, {103}, {014} and {015} planes is 55% or greater, and the dispersion of total of four-plane intensity ratios depending on locations is 20% or less. The hafnium alloy target excels in film forming property and film forming rate, can reduce particle occurrence and is suitable for formation of a high dielectric gate insulating film such as HfO film or HfON film. Further, there is provided a process for producing the hafnium alloy target.