VAPORIZER, FILM FORMING APPARATUS INCLUDING THE SAME, METHOD OF VAPORIZATION AND METHOD OF FORMING FILM

摘要

A vaporizer permitting to keep track of the progression of clogging therein; and relevant method of vaporization. Further, a vaporizer permitting to remove clog prior to complete clogging without the need to disassemble the vaporizer; relevant method of vaporization. In particular, a vaporizer including a gas channel wherein a carrier gas is introduced from one end of the gas channel and wherein the carrier gas containing a raw solution is fed from the other end of the gas channel into a vaporization zone to effect vaporization, characterized in that the one end of the gas channel is fitted with not only a flow rate control unit (MFC) but also means for detecting the pressure within the gas channel. Further, the vaporizer is characterized by being fitted with means for introducing in the gas channel a chemical solution capable of dissolving any deposit or sticking matter lying in the gas channel.