| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma generating device, and its operation method, with a simple structure and an excellent operability, capable of generating high-density plasma by efficiently taking in microwave. <P>SOLUTION: The microwave plasma generating device equipped with a discharge vessel 1 in which prescribed gas is introduced to generate plasma, and a waveguide 4 connected to the discharge vessel 1 and introducing microwaves into the discharge vessel, is provided with a linear conductor 16 in parallel with the E-face direction of the waveguide at a connection part of the waveguide 4 and the discharge vessel 1. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
