| 摘要 |
PROBLEM TO BE SOLVED: To provide a smooth carbon protective film having high hardness capable of preventing formation of particle-like projections, a magnetic recording medium and a magnetic head having the same, and a magnetic storage device. SOLUTION: A carbon protective film deposition apparatus using an FCA method comprises a generation part to generate carbon particle group, a filter part to sort the carbon particle group, a plasma forming part, and a film deposition part to deposit a carbon protective film. In the plasma forming part, carbon particles are crushed by Ar ions or the like to form plasma, and ionized to carbon ions, preventing the carbon particles from being incorporated in the carbon protective film. COPYRIGHT: (C)2004,JPO&NCIPI
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