Process for the production of shaped articles of niobium or tantalum by electrochemical etching

摘要

Process for the production of shaped articles of niobium or tantalum by electrochemical etching of a niobium or tantalum sheet covered by a structured photoresist mask in an aqueous solution containing hydrofluoric acid, the etching being effected under electrochemical conditions under which strong noise is superposed on the etching current and the etching solution contains a water-soluble polymer.