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发明名称
SCHALTUNGSNETZWERK UND VERFAHREN FÜR ATOMISCHE KETTEN
摘要
申请公布号
DE69533365(D1)
申请公布日期
2004.09.16
申请号
DE1995633365
申请日期
1995.11.08
申请人
JAPAN SCIENCE AND TECHNOLOGY AGENCY, KAWAGUCHI
发明人
YAMADA, TOSHISHIGE;TAKIGUCHI, YOSHIHIRO;HUANG, DEHUAN;YAMAMOTO, YOSHIHISA
分类号
B82B1/00;B82B3/00;H01L45/00;(IPC1-7):H01L29/12;H01L21/04
主分类号
B82B1/00
代理机构
代理人
主权项
地址
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