BELLOWS PUMP

摘要

PROBLEM TO BE SOLVED: To prevent damage to the service life of a pump driving machine section due to gas containing chemicals that permeates a bellows and enters a space inside the bellows from a pump chamber. SOLUTION: The inside space 20 of the bellows 4 is airtightly separated from a pump driving machine chamber 16. An inside space 4 is scavenged by the use of a gas supply pipe 24 and a gas exhaust pipe 26. COPYRIGHT: (C)2004,JPO&NCIPI